Tegal

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Tegal

Tegal 903e Chuck 6 Inch, Black 39-927-008

Tegal 903e Chuck - $2800.00

Tegal 903e Chuck 6 Inch, Black 39-927-008

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-926-001

Tegal Plasma Etch - $2800.00

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-926-001

Tegal 701 Inline Automatic Wafer Rf Plasma Etcher Tested Working As-is

Tegal 701 Inline - $2756.70

Tegal 701 Inline Automatic Wafer Rf Plasma Etcher Tested Working As-is

80-095-794 Upc,n2,225sccm ,tegal 901e Tegal 903e Plasma Etcher

80-095-794 Upc,n2,225sccm ,tegal - $2750.00

80-095-794 Upc,n2,225sccm ,tegal 901e Tegal 903e Plasma Etcher

Tegal 901e Tegal 903e Press/vacuum W/atm Sns Item Cg 1146 Id-awm-b-5-3

Tegal 901e Tegal - $2750.00

Tegal 901e Tegal 903e Press/vacuum W/atm Sns Item Cg 1146 Id-awm-b-5-3

Tek-temp Instruments Tkd200/5118ir Was For Tegal 903e Etcher Working Awr-031

Tek-temp Instruments Tkd200/5118ir - $2750.00

Tek-temp Instruments Tkd200/5118ir Was For Tegal 903e Etcher Working Awr-031

Tek-temp Instruments Tkd200/5118t1 Was For Tegal 903e Etcher Working Awr-032

Tek-temp Instruments Tkd200/5118t1 - $2750.00

Tek-temp Instruments Tkd200/5118t1 Was For Tegal 903e Etcher Working Awr-032

Tegal 803 Inline Automatic Wafer Rf Plasma Etcher Untested As Is

Tegal 803 Inline - $2649.96

Tegal 803 Inline Automatic Wafer Rf Plasma Etcher Untested As Is

Item Cr1113-00301 Rf Matching Network For Tegal 901e 903e Dq-2-001

Item Cr1113-00301 Rf - $2550.00

Item Cr1113-00301 Rf Matching Network For Tegal 901e 903e Dq-2-001

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-002

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-002

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-003

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-003

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-004

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-004

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-005

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-005

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-006

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-006

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-007

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-007

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-008

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-008

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-009

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-009

Item Cr1113-00801rw W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-014

Item Cr1113-00801rw W/ - $2550.00

Item Cr1113-00801rw W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-014

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-015

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-015

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-016

Item Cr1113-00301 W/ - $2550.00

Item Cr1113-00301 W/ 31-086-004 Rf Matching Network ,tegal 901e 903e Dq-2-016

Press/vacum W/atm Snsr Cg1146-w00876 Tegal 901e 903e Etcher Dq-4-007

Press/vacum W/atm Snsr - $2550.00

Press/vacum W/atm Snsr Cg1146-w00876 Tegal 901e 903e Etcher Dq-4-007

Kyocera 300mm Esc Pn Xas-13758 002 For Tegal Etch

Kyocera 300mm Esc - $2531.25

Kyocera 300mm Esc Pn Xas-13758 002 For Tegal Etch

Tegal Cr1324-00400 Rf Match Network Source Strip 6500 Hre Used Working

Tegal Cr1324-00400 Rf - $2511.18

Tegal Cr1324-00400 Rf Match Network Source Strip 6500 Hre Used Working

Tegal 1513e Dc Module Item Ce 1029 Parts

Tegal 1513e Dc - $2500.00

Tegal 1513e Dc Module Item Ce 1029 Parts

Tegal 1513e Ac Module Item Ce 1028 Parts

Tegal 1513e Ac - $2500.00

Tegal 1513e Ac Module Item Ce 1028 Parts

Tegal 1513e Ac Module Item Ce 1028 Parts

Tegal 1513e Ac - $2500.00

Tegal 1513e Ac Module Item Ce 1028 Parts

Tegal 1513e Motor Controller Item Ce 1093 Parts

Tegal 1513e Motor - $2500.00

Tegal 1513e Motor Controller Item Ce 1093 Parts

Tegal 1513e Matching Network Item Cr 1031

Tegal 1513e Matching - $2500.00

Tegal 1513e Matching Network Item Cr 1031

Tegal Plasma Etcher Asher Upgrade Kit 29-208-001 Touchscreen Replacement

Tegal Plasma Etcher - $2500.00

Tegal Plasma Etcher Asher Upgrade Kit 29-208-001 Touchscreen Replacement

Tegal Chuck 37-139-001. 39-139-001

Tegal Chuck 37-139-001. - $2500.00

Tegal Chuck 37-139-001. 39-139-001

Tegal Chuck 39-336-018

Tegal Chuck 39-336-018 - $2500.00

Tegal Chuck 39-336-018

Tegal Bias Power Supply 80-095-164 Id-aws-012

Tegal Bias Power - $2500.00

Tegal Bias Power Supply 80-095-164 Id-aws-012

Tegal T-1000e Dc Supply Id-aws-012

Tegal T-1000e Dc - $2500.00

Tegal T-1000e Dc Supply Id-aws-012

Tegal 901e Tegal 903e Wafer Transfer Profacture Cw1078-60401 Id-aws-7-2-001

Tegal 901e Tegal - $2500.00

Tegal 901e Tegal 903e Wafer Transfer Profacture Cw1078-60401 Id-aws-7-2-001

Tegal 901e Tegal 903e Wafer Transfer Profacture Cw1078-60401 Id-aws-7-2-002

Tegal 901e Tegal - $2500.00

Tegal 901e Tegal 903e Wafer Transfer Profacture Cw1078-60401 Id-aws-7-2-002

Tegal 901e Tegal 903e Wafer Transfer Cw1078-50301 Id-aws-7-2-003

Tegal 901e Tegal - $2500.00

Tegal 901e Tegal 903e Wafer Transfer Cw1078-50301 Id-aws-7-2-003

Tegal 901e Tegal 903e Wafer Transfer Cw1078 Id-aws-7-2-004

Tegal 901e Tegal - $2500.00

Tegal 901e Tegal 903e Wafer Transfer Cw1078 Id-aws-7-2-004

Tegal 901e Chuck 6 Inch 39-733-004 Id-aws-l-3-2-004

Tegal 901e Chuck - $2500.00

Tegal 901e Chuck 6 Inch 39-733-004 Id-aws-l-3-2-004

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-424-001 Rev A

Tegal Plasma Etch - $2500.00

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-424-001 Rev A

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-733-003 Rev L

Tegal Plasma Etch - $2500.00

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-733-003 Rev L

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-733-004 Rev K 5 Inch

Tegal Plasma Etch - $2500.00

Tegal Plasma Etch Asher Equipment Spare Parts Pn Tgl-39-733-004 Rev K 5 Inch

Pn Tgl-39-735-008 Low Electrode Chuck Tegal Spare Parts

Pn Tgl-39-735-008 Low - $2500.00

Pn Tgl-39-735-008 Low Electrode Chuck Tegal Spare Parts

Pn Tgl-39-735-003 Low Electrode Chuck 5 Inch Tegal Spare Parts

Pn Tgl-39-735-003 Low - $2500.00

Pn Tgl-39-735-003 Low Electrode Chuck 5 Inch Tegal Spare Parts

Tegal 94-484-001 Cable Assy, 410506

Tegal 94-484-001 Cable - $2500.00

Tegal 94-484-001 Cable Assy, 410506

Tegal 901e Tegal 903e Gas Line Has Dlvy Item Cg 1145 Id-awm-b-5-6

Tegal 901e Tegal - $2450.00

Tegal 901e Tegal 903e Gas Line Has Dlvy Item Cg 1145 Id-awm-b-5-6

Pn33-085-002 Tegal 903e Tegal 901e Bellows Lower Electode

Pn33-085-002 Tegal 903e - $2450.00

Pn33-085-002 Tegal 903e Tegal 901e Bellows Lower Electode

Tegal 40-140-003d, Ring, Insultator, Ceramic, 410361

Tegal 40-140-003d, Ring, - $2350.00

Tegal 40-140-003d, Ring, Insultator, Ceramic, 410361

Tegal 39-733-003 Lower Non-anodize Electrode

Tegal 39-733-003 Lower - $2335.14

Tegal 39-733-003 Lower Non-anodize Electrode

Tegal 39-735-003 Lower Non-anodize Electrode

Tegal 39-735-003 Lower - $2335.14

Tegal 39-735-003 Lower Non-anodize Electrode

Cw1078-40401 Wafer Transfer W/99-275-003 Pcb For Tegal 901e 903e Dq-1-005

Cw1078-40401 Wafer Transfer - $2250.00

Cw1078-40401 Wafer Transfer W/99-275-003 Pcb For Tegal 901e 903e Dq-1-005

Cw1078-40401 Wafer Transfer W/99-274-003 Pcb For Tegal 901e 903e Dq-1-006

Cw1078-40401 Wafer Transfer - $2250.00

Cw1078-40401 Wafer Transfer W/99-274-003 Pcb For Tegal 901e 903e Dq-1-006

Cw1078-40401 Wafer Transfer W/99-274-003 Pcb For Tegal 901e 903e Dq-1-007

Cw1078-40401 Wafer Transfer - $2250.00

Cw1078-40401 Wafer Transfer W/99-274-003 Pcb For Tegal 901e 903e Dq-1-007

Cw1003-w00137 Wafer Transfer W/99-247-002 Pcb For Tegal 901e 903e Dq-1-008

Cw1003-w00137 Wafer Transfer - $2250.00

Cw1003-w00137 Wafer Transfer W/99-247-002 Pcb For Tegal 901e 903e Dq-1-008

Rf Plasma Products T-502s 500w , Cr1087-20101rw 80-055-140 Tegal Dq-4-001

Rf Plasma Products - $2250.00

Rf Plasma Products T-502s 500w , Cr1087-20101rw 80-055-140 Tegal Dq-4-001

Rf Plasma Products T-502 500w Rf Generator For Tegal 901e 903e Etcher Dq-4-002

Rf Plasma Products - $2250.00

Rf Plasma Products T-502 500w Rf Generator For Tegal 901e 903e Etcher Dq-4-002

Pn Tgl-39-336-018  Tegal Spare Parts

Pn Tgl-39-336-018 - $2200.00

Pn Tgl-39-336-018 Tegal Spare Parts

Pn Tgl-39-344-001 Tegal Spare Parts

Pn Tgl-39-344-001 Tegal - $2200.00

Pn Tgl-39-344-001 Tegal Spare Parts

Pn Tgl-39-676-001 Tegal Spare Parts For Tegal 1500 Series Plasma Etcher

Pn Tgl-39-676-001 Tegal - $2200.00

Pn Tgl-39-676-001 Tegal Spare Parts For Tegal 1500 Series Plasma Etcher

Tegal 901e 903e Circulating System Neslab Rte-101 Awd-d-2-10-016

Tegal 901e 903e - $2150.00

Tegal 901e 903e Circulating System Neslab Rte-101 Awd-d-2-10-016

Tegal 901e 903e Circulating System Neslab Rte-101 Awd-d-2-10-017

Tegal 901e 903e - $2150.00

Tegal 901e 903e Circulating System Neslab Rte-101 Awd-d-2-10-017

Tegal 901e 903e Circulating System Neslab Rte-211 Awd-d-2-10-018

Tegal 901e 903e - $2150.00

Tegal 901e 903e Circulating System Neslab Rte-211 Awd-d-2-10-018

Gas Delivery Item Cg 1015-00500 W/ 99-126-005 ,tegal 901e 903e Etcher Dq-4-004

Gas Delivery Item - $2150.00

Gas Delivery Item Cg 1015-00500 W/ 99-126-005 ,tegal 901e 903e Etcher Dq-4-004

Gas Delivery Item Cg 1015-00504 W/ 99-126-006 Tegal 901e 903e Etcher Dq-4-005

Gas Delivery Item - $2150.00

Gas Delivery Item Cg 1015-00504 W/ 99-126-006 Tegal 901e 903e Etcher Dq-4-005

Gas Delivery Item Cg 1145-w00948 W/ 99-126-006 ,tegal 901e 903e Etcher Dq-4-008

Gas Delivery Item - $2150.00

Gas Delivery Item Cg 1145-w00948 W/ 99-126-006 ,tegal 901e 903e Etcher Dq-4-008

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410333

Tegal 99-223-002 Pcb, - $2100.00

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410333

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410334

Tegal 99-223-002 Pcb, - $2100.00

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410334

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410335

Tegal 99-223-002 Pcb, - $2100.00

Tegal 99-223-002 Pcb, Dsn-2, Dual Sensor, 410335

Tegal 99-173-008 Pcb, Rfg-8, Rf Gen Interface, 410336

Tegal 99-173-008 Pcb, - $2100.00

Tegal 99-173-008 Pcb, Rfg-8, Rf Gen Interface, 410336

Tegal 99-173-008 Pcb, Rfg-8, Rf Gen Interface, 410337

Tegal 99-173-008 Pcb, - $2100.00

Tegal 99-173-008 Pcb, Rfg-8, Rf Gen Interface, 410337

Tegal Cc1327-00300 Ez Reactor Assembly Hre-pm1 6500 Hre Used Working

Tegal Cc1327-00300 Ez - $2011.18

Tegal Cc1327-00300 Ez Reactor Assembly Hre-pm1 6500 Hre Used Working

Tegal 37-441-004 Cooling Flange 6500 Hre Dual Frequency Etch System Used Working

Tegal 37-441-004 Cooling - $2011.18

Tegal 37-441-004 Cooling Flange 6500 Hre Dual Frequency Etch System Used Working

Vat 14046-pe44-1016 Hv High Vacuum Gate Valve Tegal 6500 Hre Used Working

Vat 14046-pe44-1016 Hv - $2011.18

Vat 14046-pe44-1016 Hv High Vacuum Gate Valve Tegal 6500 Hre Used Working

Tegal Plasmaline Model 421 Plasma Etcher / Asher, Lot Of 2

Tegal Plasmaline Model - $2000.00

Tegal Plasmaline Model 421 Plasma Etcher / Asher, Lot Of 2

Tegal Ce1323-10101 Ac Module Distribution

Tegal Ce1323-10101 Ac - $2000.00

Tegal Ce1323-10101 Ac Module Distribution

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-003

Tegal 901e Tegal - $1999.00

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-003

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-004

Tegal 901e Tegal - $1999.00

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-004

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-005

Tegal 901e Tegal - $1999.00

Tegal 901e Tegal 903e Tegal Wafer Transfer Cw1078 Id-awm-f-4-005